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Applications such as quantum and biological sensing require visible wavelengths of operation. While incumbent integrated photonic platforms such as silicon nitride enable low-loss light propagation at these wavelengths, the autofluorescence suffered in silicon nitride causes unwanted signals that will significantly reduce performance in sensing applications. Sputtered metal oxides have recently emerged as a promising alternative platform for integrated photonics from visible to NIR, with the added advantage of a drastic reduction in autofluorescence in the visible regime. Here, I present our recent results in propagation loss and autofluorescence characterization of our sputtered metal oxide platforms in the visible light regime.
Amy C. Foster
"Sputtered metal-oxide waveguides for visible-wavelength integrated photonics", Proc. SPIE PC12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, PC1288904 (13 March 2024); https://doi.org/10.1117/12.3009168
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Amy C. Foster, "Sputtered metal-oxide waveguides for visible-wavelength integrated photonics," Proc. SPIE PC12889, Integrated Optics: Devices, Materials, and Technologies XXVIII, PC1288904 (13 March 2024); https://doi.org/10.1117/12.3009168