ITO-based spatial light modulators for potential integrations with VCSELS

Jiachi Ye; Yaliang Gui; Chaobo Dong; Martin Thomaschewski; Elham Heidari; Volker Sorger; Hamed Dalir; Hao Wang

doi:10.1117/12.3003215

11 April 2024 ITO-based spatial light modulators for potential integrations with VCSELS

Jiachi Ye, Yaliang Gui, Chaobo Dong, Martin Thomaschewski, Elham Heidari, Volker Sorger, Hamed Dalir, Hao Wang

Proceedings Volume PC12897, High Contrast Metastructures XIII; PC128970K (2024) https://doi.org/10.1117/12.3003215
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Here, we present an electrically tunable metasurface based on indium tin oxide (ITO) that enables dynamic manipulation of light wavefronts at a theoretical frequency range of 15 to 400 GHz. This all-solid-state spatial light modulator (SLM) modulates both the phase and amplitude of incoming light around the 1550 nm wavelength by utilizing an ITO layer and a periodic metallic grating structure separated by a thin AL₂O₃ capacitive layer. When a voltage is applied, a charge accumulation layer forms in the ITO and the ITO-oxide interface, effectively modulating the complex refractive index of the ITO. The optical transparency of the ITO layer at 1550 nm surpasses conventional reflected SLM designs, making it suitable for seamless integration with Vertical-Cavity Surface-Emitting Lasers (VCSELs), potentially reducing power consumption, heat generation, and increasing modulation bandwidth. Furthermore, the compact design and simple fabrication process allow easy integration into Photonic Integrated Circuits (PICs) as an on-chip laser source with dynamic beam steering capabilities. This unique set of properties opens up possibilities for advanced applications in on-chip computing, optical communication, environmental sensing, health diagnostics, and the development of next-generation optical computing architectures and neuromorphic computing systems.

Conference Presentation

Citation Download Citation

Jiachi Ye, Yaliang Gui, Chaobo Dong, Martin Thomaschewski, Elham Heidari, Volker Sorger, Hamed Dalir, and Hao Wang "ITO-based spatial light modulators for potential integrations with VCSELS", Proc. SPIE PC12897, High Contrast Metastructures XIII, PC128970K (11 April 2024); https://doi.org/10.1117/12.3003215

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