Low-cost and scalable manufacturing of optical metasurfaces in the visible using engineered optical materials

Junsuk Rho

doi:10.1117/12.3014260

11 June 2024 Low-cost and scalable manufacturing of optical metasurfaces in the visible using engineered optical materials

Junsuk Rho

Author Affiliations +

Proceedings Volume PC12990, Metamaterials XIV; PC129901C (2024) https://doi.org/10.1117/12.3014260
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

Here, we demonstrate low-cost, scalable manufacturing of optical metasurfaces with three approaches: 1) increasing a refractive index of resin with dielectric particle embedding for single-step nanoimprinting, 2) suppressing optical losses of hydrogenated amorphous silicon (a-Si:H) to apply complementary-metal-oxide-semiconductor technologies, and 3) high-index Atomic Layer Deposited (ALD) structural resin. We demonstrate the effectiveness of these materials in creating optical metasurfaces operating at different wavelengths in the infrared, visible, and ultraviolet spectra. Our approaches using PER, low-loss a-Si:H, and hybrid ALD structural resin enables the low-cost, large-area manufacturing of efficient optical metasurfaces across different wavelengths, facilitating the commercialization of metasurface-based photonic devices.

Conference Presentation

Citation Download Citation

Junsuk Rho "Low-cost and scalable manufacturing of optical metasurfaces in the visible using engineered optical materials", Proc. SPIE PC12990, Metamaterials XIV, PC129901C (11 June 2024); https://doi.org/10.1117/12.3014260

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