On the benefit of external pulse compression below 100fs for micromachining applications

Rainer Kling; Beat Neuenschwander

doi:10.1117/12.3028718

20 June 2024 On the benefit of external pulse compression below 100fs for micromachining applications

Rainer Kling, Beat Neuenschwander

Proceedings Volume PC13005, Laser + Photonics for Advanced Manufacturing ; PC130050N (2024) https://doi.org/10.1117/12.3028718
Event: SPIE Photonics Europe, 2024, Strasbourg, France

Abstract

External pulse compression offers the possibility to shorten the pulse duration of industrial grade femtosecond lasers from 300 to 500 fs well below 100 fs with an efficiency of typically 90%. We nvestigated the sub 100 fs regime for industrial laser micromachining processes. We show first results of a parametric study on ablation efficiency varying the pulse duration over 2 orders of magnitude, from 57 fs to 5 ps. We further characterize the micro-processing quality in terms of the surface roughness and the minimum achievable structure size for metals, semiconductors and glasses with an industrial grade Carbide laser from Light conversion at a wavelength of 1030 nm in combination with MIKS1 S pulse compressor from N2 Photonics (offering sub 100 fs pulses) and a high end Excelliscan galvo scanner from Scanlab for repetition rates from 80 kHz up to 1.2 MHz.

Conference Presentation

Citation Download Citation

Rainer Kling and Beat Neuenschwander "On the benefit of external pulse compression below 100fs for micromachining applications", Proc. SPIE PC13005, Laser + Photonics for Advanced Manufacturing , PC130050N (20 June 2024); https://doi.org/10.1117/12.3028718

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