Combined multiexposure laser interference lithography concept for NOEMS and diffractive optics fabrication

Manuel J. L. F. F. Rodrigues; Patrícia C. Sousa; Joana D. Santos; Rosana A Dias; Filipe S. Alves; Diogo E. Aguiam

doi:10.1117/12.3029564

20 June 2024 Combined multiexposure laser interference lithography concept for NOEMS and diffractive optics fabrication

Manuel J. L. F. F. Rodrigues, Patrícia C. Sousa, Joana D. Santos, Rosana A Dias, Filipe S. Alves, Diogo E. Aguiam

Proceedings Volume PC13005, Laser + Photonics for Advanced Manufacturing ; PC1300515 (2024) https://doi.org/10.1117/12.3029564
Event: SPIE Photonics Europe, 2024, Strasbourg, France

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Manuel J. L. F. F. Rodrigues, Patrícia C. Sousa, Joana D. Santos, Rosana A Dias, Filipe S. Alves, and Diogo E. Aguiam "Combined multiexposure laser interference lithography concept for NOEMS and diffractive optics fabrication", Proc. SPIE PC13005, Laser + Photonics for Advanced Manufacturing , PC1300515 (20 June 2024); https://doi.org/10.1117/12.3029564

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