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18 June 2024 Digital modelling of a massively parallelized multiphoton polymerization plot process
Joël Rovera, Valeriia Sedova, Florie Ogor, Andreas Erdmann, Kevin Heggarty
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Proceedings Volume PC13023, Computational Optics 2024; PC1302309 (2024) https://doi.org/10.1117/12.3017550
Event: SPIE Optical Systems Design, 2024, Strasbourg, France
Abstract
Multi-photon polymerization (MPP) is widely recognised as promising approach for the fabrication of fully 3D micro- or nano-metric structures, occurring for example in 3D optical metasurfaces. However, increases in fabrication speed by parallelizing the write process are required to facilitate industrial scale application. We present our work on the adaptation of a photolithography simulator, Dr LITHO, to model the DOE and SLM parallelised MPP process in a novel photoplotter currently developed in the EU Fabulous project, including the calibration of key simulator parameters using feedback from the parallel MPP fabrication of different test structures.
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Joël Rovera, Valeriia Sedova, Florie Ogor, Andreas Erdmann, and Kevin Heggarty "Digital modelling of a massively parallelized multiphoton polymerization plot process", Proc. SPIE PC13023, Computational Optics 2024, PC1302309 (18 June 2024); https://doi.org/10.1117/12.3017550
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KEYWORDS
Fabrication
Modeling
Polymerization
3D modeling
Multiphoton processes
Device simulation
Diffractive optical elements
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