Litho-only double patterning approaches: positive–negative versus positive–positive tone

Michael M. Crouse; Ryusuke Uchida; Youri van Dommelen; Tomoyuki Ando; Emil P. Schmitt-Weaver; Masaru Takeshita; Shunder Wu; Robert M. Routh

doi:10.1117/1.3042219

1 January 2009 Litho-only double patterning approaches: positive–negative versus positive–positive tone

Michael M. Crouse, Ryusuke Uchida, Youri van Dommelen, Tomoyuki Ando, Emil P. Schmitt-Weaver, Masaru Takeshita, Shunder Wu, Robert M. Routh

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 1, 011006 (January 2009). https://doi.org/10.1117/1.3042219

Abstract

Double patterning is considered the most viable option for 32- and 22-nm complementary metal-oxide semiconductor (CMOS) node development and has seen a surge of interest due to the remaining challenges of next-generation lithography systems. Most double patterning approaches previously described require intermediate processing steps (e.g., hard mask etching, resist freezing, spacer material deposition, etc.). These additional steps can add significantly to the cost of producing the double pattern. Alternative litho-only double patterning processes are investigated to achieve a composite image without the need for intermediate processing steps. A comparative study between positive–negative (TArF-P6239+N3007) and positive–positive tone (TArF-P6239+PP002) imaging is described. In brief, the positive–positive tone approach is found to be a superior solution due to a variety of considerations.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Michael M. Crouse, Ryusuke Uchida, Youri van Dommelen, Tomoyuki Ando, Emil P. Schmitt-Weaver, Masaru Takeshita, Shunder Wu, and Robert M. Routh "Litho-only double patterning approaches: positive–negative versus positive–positive tone," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(1), 011006 (1 January 2009). https://doi.org/10.1117/1.3042219

Published: 1 January 2009

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