Analysis of residual fabrication errors for computer controlled polishing aspherical mirrors

Xuejun Zhang; Jingchi Yu; Zhongyu Zhang; Quandou Wang; Weiping Zheng

doi:10.1117/1.601578

1 December 1997 Analysis of residual fabrication errors for computer controlled polishing aspherical mirrors

Xuejun Zhang, Jingchi Yu, Zhongyu Zhang, Quandou Wang, Weiping Zheng

Optical Engineering, Vol. 36, Issue 12, (December 1997). https://doi.org/10.1117/1.601578

A quantitative expression for residual errors and mid-spatialfrequency errors of the aspherical surface finished by computer controlled polishing (CCP) is discussed in terms of the power spectral density model. The relationship between the magnitude of these errors and the CCP parameters is investigated using experimentation. An optimized CCP process is presented to reduce the residual surface errors. By properly choosing the polishing parameters such as tool size and lap material the residual errors can be removed. The final surface error of a hyperbolic mirror has reached 0.038 wave rms with residual errors less than 0.018 wave rms.

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Xuejun Zhang, Jingchi Yu, Zhongyu Zhang, Quandou Wang, and Weiping Zheng "Analysis of residual fabrication errors for computer controlled polishing aspherical mirrors," Optical Engineering 36(12), (1 December 1997). https://doi.org/10.1117/1.601578

Published: 1 December 1997

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