13 June 2013 Practical fabrication and analysis of an optimized compact eight-channel silicon arrayed-waveguide grating
Hongqiang Li, Yaoting Bai, Xiaye Dong, Enbang Li, Yang Li, Wenqian Zhou, Yu Liu
Author Affiliations +
Abstract
We have designed, fabricated, and characterized a 1×8 ultra-small compact arrayed-waveguide grating (AWG) on silicon-on-insulator (SOI) in a fiber grating demodulation integration microsystem. The miniature AWG, consisting of Si photonic wire waveguides, was designed using the complete modeling simulation in the beam propagation method. The device was fabricated on an SOI substrate and evaluated in the wavelength range around 1.55 μm, with an effective area of 230×160  μm . Clear demultiplexing characteristics were observed with a channel spacing of 1.91 nm. The influence of the waveguide widths on crosstalk defined by adjacent channel crosstalk and phase error is discussed. Insertion loss, crosstalk, and nonuniformity of loss were measured to be −3.18 , −23.1 , and −1.35  dB , respectively. Thus, the AWG design is the best choice for a fiber Bragg grating demodulation microsystem.
© 2013 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2013/$25.00 © 2013 SPIE
Hongqiang Li, Yaoting Bai, Xiaye Dong, Enbang Li, Yang Li, Wenqian Zhou, and Yu Liu "Practical fabrication and analysis of an optimized compact eight-channel silicon arrayed-waveguide grating," Optical Engineering 52(6), 064602 (13 June 2013). https://doi.org/10.1117/1.OE.52.6.064602
Published: 13 June 2013
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Cited by 9 scholarly publications.
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KEYWORDS
Waveguides

Silicon

Demodulation

Etching

Microsystems

Fiber Bragg gratings

Optical design

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