CONFERENCE PROCEEDINGS
Advanced Search
Home > Journals > Opt. Eng. > Volume 53 > Issue 5 > Article
Open Access
13 February 2014 Micro-hole drilling and cutting using femtosecond fiber laser
Huan Huang, Lih-Mei Yang, Jian Liu
Author Affiliations +
Optical Engineering, Vol. 53, Issue 5, 051513 (February 2014). https://doi.org/10.1117/1.OE.53.5.051513
Abstract
Micro-hole drilling and cutting in ambient air are presented by using a femtosecond fiber laser. At first, the micro-hole drilling was investigated in both transparent (glasses) and nontransparent (metals and tissues) materials. The shape and morphology of the holes were characterized and evaluated with optical and scanning electron microscopy. Debris-free micro-holes with good roundness and no thermal damage were demonstrated with the aspect ratio of 8∶1 . Micro-hole drilling in hard and soft tissues with no crack or collateral thermal damage is also demonstrated. Then, trench micromachining and cutting were studied for different materials and the effect of the laser parameters on the trench properties was investigated. Straight and clean trench edges were obtained with no thermal damage.
CC BY: © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
Citation Download Citation
Huan Huang, Lih-Mei Yang, and Jian Liu "Micro-hole drilling and cutting using femtosecond fiber laser," Optical Engineering 53(5), 051513 (13 February 2014). https://doi.org/10.1117/1.OE.53.5.051513
Published: 13 February 2014
JOURNAL ARTICLE
 9 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Lens.org Logo
CITATIONS
Cited by 62 scholarly publications and 1 patent.
Advertisement
Advertisement
KEYWORDS
Laser drilling
Laser cutting
Fiber lasers
Scanning electron microscopy
Laser ablation
Femtosecond phenomena
Micromachining
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top