CONFERENCE PROCEEDINGS
Advanced Search
Home > Journals > Opt. Eng. > Volume 57 > Issue 6 > Article
Open Access
26 February 2018 Development of high-resolution active matrix spatial light modulator
Yong-Hae Kim, Chi-Young Hwang, Ji Hun Choi, Jae-Eun Pi, Jong-Heon Yang, Seong-Mok Cho, Sang-Hoon Cheon, Gi Heon Kim, Kyunghee Choi, Hee-Ok Kim, Won-Jae Lee, Han-Byeol Kang, Chi-Sun Hwang
Author Affiliations +
Optical Engineering, Vol. 57, Issue 6, 061606 (February 2018). https://doi.org/10.1117/1.OE.57.6.061606
Abstract
We developed a high-resolution active matrix spatial light modulator on a glass substrate. To integrate a switching device on the glass substrate, we designed a high-performance oxide thin-film transistor with a minimum channel length of 1  μm and a maximum processing temperature of 380°C. To drive a large number of data lines, we used multiple source drivers and data drivers as well. For an optical modulation, we optimized a liquid crystal of a high anisotropic refractive index of 0.25 with a cell gap of 2.5  μm, which was effectively operated until pixel pitch is 1.6  μm. Hologram was successfully reconstructed by fabricated SLM with 7-μm pixel pitch. For the other approach for a high-resolution spatial light modulator, we tested a phase change material of Ge2Sb2Te5 [GST]. The variation of refractive index between a polycrystalline phase and an amorphous phase of the GST film is used for a hologram reconstruction. By optimizing the underlying oxide thickness, we can show a color hologram without color filters.
© 2018 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2018/$25.00 © 2018 SPIE
Citation Download Citation
Yong-Hae Kim, Chi-Young Hwang, Ji Hun Choi, Jae-Eun Pi, Jong-Heon Yang, Seong-Mok Cho, Sang-Hoon Cheon, Gi Heon Kim, Kyunghee Choi, Hee-Ok Kim, Won-Jae Lee, Han-Byeol Kang, and Chi-Sun Hwang "Development of high-resolution active matrix spatial light modulator," Optical Engineering 57(6), 061606 (26 February 2018). https://doi.org/10.1117/1.OE.57.6.061606
Received: 31 October 2017; Accepted: 31 January 2018; Published: 26 February 2018
JOURNAL ARTICLE
 8 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Lens.org Logo
CITATIONS
Cited by 10 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Holograms
Spatial light modulators
Oxides
Glasses
3D image reconstruction
Liquid crystals
Diffraction
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top