Dr. Sébastien Hentz
at CEA-LETI
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 February 2018 Paper
M. Hermouet, M. Sansa, L. Banniard, A. Fafin, M. Gely, P. E. Allain, E. Gil Santos, I. Favero, T. Alava, G. Jourdan, S. Hentz
Proceedings Volume 10491, 104910C (2018) https://doi.org/10.1117/12.2290322
KEYWORDS: Resonators, Very large scale integration, Silicon, Optomechanical design, Sensors

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top