PROCEEDINGS VOLUME 2862
SPIE'S 1996 INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION | 4-9 AUGUST 1996
Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays
Editor(s): John C. Stover
Editor Affiliations +
IN THIS VOLUME

6 Sessions, 19 Papers, 0 Presentations, 0 Posters
SPIE'S 1996 INTERNATIONAL SYMPOSIUM ON OPTICAL SCIENCE, ENGINEERING, AND INSTRUMENTATION
4-9 August 1996
Denver, CO, United States
Industry Overview
Randal K. Goodall
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256190
Microroughness Metrology I
Thomas A. Germer, Clara C. Asmail
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256204
Peter Wagner, H. A. Gerber, D. Graef, R. Schmolke, M. Suhren
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256205
Hendrik Rothe, Andre Kasper
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256206
Yoshitate Takakura, Mohamed Tahar Sehili, Patrick Meyrueis
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256207
Microroughness Metrology II
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256208
Eugene L. Church, John C. Stover
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256191
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256192
Bradley W. Scheer
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256193
Yoshiharu Ichikawa, Jun-ichiro Toriwaki
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256194
Particle and Defect Metrology I
George W. Mulholland, Nelson Bryner, Walter Liggett, Bradley W. Scheer, Randal K. Goodall
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256195
Kevin Welch
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256196
Particle and Defect Metrology II
Greg W. Starr, E. Dan Hirleman
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256197
Brent Martin Nebeker, Greg W. Starr, E. Dan Hirleman
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256198
Flatness Metrology
Peter Wagner, H. A. Gerber, R. Schmolke, R. Velten
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256199
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256200
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256201
Alok Kumar Das, Amar K. Ganguly, Anawar Hussain, Shila Ghosh, Bharat P. Choudhury
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256202
Qun Hao, Mang Cao, Dacheng Li
Proceedings Volume Flatness, Roughness, and Discrete Defect Characterization for Computer Disks, Wafers, and Flat Panel Displays, (1996) https://doi.org/10.1117/12.256203
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