PZT (lead zirconate titanate)-glued bimorph deformable mirrors are widely used in hard X-ray regimes, however, they have not yet been used in soft X-ray regimes because they are less compatible for usage under high vacuum. Therefore, we have developed a glue-free bimorph deformable mirror, in which silver nanoparticles were employed to bond PZT actuators to mirror substrates.
In this study, we manufactured a 400 mm long deformable mirror which has 30 channels on plane mirror surfaces. We evaluated the PZT response by applying voltage to each electrode.
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