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4 October 2023 Fabrication and LTP test result for a 460 mm long deformable mirror to reduce “junction effect”
Yoshio Ichii, Takato Inoue, Fumiharu Tramae, Shinsaku Shiroma, Shinya Aono, Xianbo Shi, Jun Qian, Luca Rebuffi, Juniki Sonoyama, Hisataka Takenaka, Satoshi Matsuyama, Lahsen Assoufid, Kazuto Yamauchi
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Proceedings Volume PC12695, Advances in Metrology for X-Ray and EUV Optics X; PC1269501 (2023) https://doi.org/10.1117/12.2680882
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States
Abstract
In this study, we manufactured a 460 mm long deformable mirror which has 28 channel-PZTs on the ellipse pre-figured mirror and flat back surfaces. We evaluated the LTP target ellipse shape measurement result and the "junction" effect by applying voltage to each electrode.
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© (2023) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Yoshio Ichii, Takato Inoue, Fumiharu Tramae, Shinsaku Shiroma, Shinya Aono, Xianbo Shi, Jun Qian, Luca Rebuffi, Juniki Sonoyama, Hisataka Takenaka, Satoshi Matsuyama, Lahsen Assoufid, and Kazuto Yamauchi "Fabrication and LTP test result for a 460 mm long deformable mirror to reduce “junction effect”", Proc. SPIE PC12695, Advances in Metrology for X-Ray and EUV Optics X, PC1269501 (4 October 2023); https://doi.org/10.1117/12.2680882
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KEYWORDS
Deformable mirrors
Fabrication
Ferroelectric materials
Manufacturing
Mirror surfaces
Nanoparticles
Physics
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