Paper
25 October 2016 The convex grating with high efficiency for hyperspectral remote sensing
Quan Liu, Jianhong Wu, Yang Zhou, Fei Gao
Author Affiliations +
Proceedings Volume 10156, Hyperspectral Remote Sensing Applications and Environmental Monitoring and Safety Testing Technology; 101561K (2016) https://doi.org/10.1117/12.2247173
Event: International Symposium on Optoelectronic Technology and Application 2016, 2016, Beijing, China
Abstract
The convex grating is one of the key elements in Offner imaging spectrometers. In this paper the diffraction efficiency of the convex grating is investigated by using rigorous coupled-wave analysis (RCWA), which indicates that within the visible and near infrared broadband, the first-order diffraction efficiency can be over 40% through controlling the blaze angle of blazed convex grating. The blazed convex grating with the period of 6.17μm in the center, the blaze angle about 2.9 degree, the anti-blaze angle about 21 degree, and the ruled area – a convex substrate with its radius 36.31mm and aperture 23.6mm has been fabricated by holographic lithography - scan ion beam etching. Experimental measurements show that the first-order diffraction efficiency is more than 30%, and the first-order diffraction efficiency at blazed wavelength can reach 62%.
© (2016) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Quan Liu, Jianhong Wu, Yang Zhou, and Fei Gao "The convex grating with high efficiency for hyperspectral remote sensing", Proc. SPIE 10156, Hyperspectral Remote Sensing Applications and Environmental Monitoring and Safety Testing Technology, 101561K (25 October 2016); https://doi.org/10.1117/12.2247173
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Cited by 4 scholarly publications.
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KEYWORDS
Diffraction gratings

Diffraction

Etching

Holography

Ion beam lithography

Ion beams

Lithography

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