New high-precision deep concave optical surface manufacturing capability

François Piché; Chris Maloney; Steve VanKerkhove; Chris Supranowicz; Paul Dumas; Keith Donohue

doi:10.1117/12.2279809

16 October 2017 New high-precision deep concave optical surface manufacturing capability

François Piché, Chris Maloney, Steve VanKerkhove, Chris Supranowicz, Paul Dumas, Keith Donohue

Proceedings Volume 10448, Optifab 2017; 104480H (2017) https://doi.org/10.1117/12.2279809
Event: SPIE Optifab, 2017, Rochester, New York, United States

Abstract

This paper describes the manufacturing steps necessary to manufacture hemispherical concave aspheric mirrors for high- NA systems. The process chain is considered from generation to final figuring and includes metrology testing during the various manufacturing steps. Corning Incorporated has developed this process by taking advantage of recent advances in commercially available Satisloh and QED Technologies equipment. Results are presented on a 100 mm concave radius nearly hemispherical (NA = 0.94) fused silica sphere with a better than 5 nm RMS figure. Part interferometric metrology was obtained on a QED stitching interferometer. Final figure was made possible by the implementation of a high-NA rotational MRF mode recently developed by QED Technologies which is used at Corning Incorporated for production. We also present results from a 75 mm concave radius (NA = 0.88) Corning ULE sphere that was produced using sub-aperture tools from generation to final figuring. This part demonstrates the production chain from blank to finished optics for high-NA concave asphere.

Citation Download Citation

François Piché, Chris Maloney, Steve VanKerkhove, Chris Supranowicz, Paul Dumas, and Keith Donohue "New high-precision deep concave optical surface manufacturing capability", Proc. SPIE 10448, Optifab 2017, 104480H (16 October 2017); https://doi.org/10.1117/12.2279809

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