EUV/X-ray Hartmann wavefront sensors and adaptive optics at Imagine Optic (Conference Presentation)

Ombeline de La Rochefoucauld; Samuel Bucourt; Daniele Cocco; Guillaume Dovillaire; Fabrice Harms; Mourad Idir; Dietmar Korn; Xavier Levecq; Martin Piponnier; Rakchanok Rungsawang; Lorenzo Raimondi; Philippe Zeitoun

doi:10.1117/12.2522510

13 May 2019 EUV/X-ray Hartmann wavefront sensors and adaptive optics at Imagine Optic (Conference Presentation)

Ombeline de La Rochefoucauld, Samuel Bucourt, Daniele Cocco, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Dietmar Korn, Xavier Levecq, Martin Piponnier, Rakchanok Rungsawang, Lorenzo Raimondi, Philippe Zeitoun

Author Affiliations +

Proceedings Volume 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI; 1103207 (2019) https://doi.org/10.1117/12.2522510
Event: SPIE Optics + Optoelectronics, 2019, Prague, Czech Republic

Abstract

Since its creation in 1996, Imagine Optic designed and manufactured high performance Shack-Hartmann wavefront (WF) sensors for many kinds of applications such as telescope alignment, laser characterization, optics qualification or adaptive optics, and for many different fields such as space optics, microscopy, high power lasers or lithography. Since 2003, Imagine Optic is actively developing EUV to X-ray Hartmann WF sensors for applications on metrology beams emitted by synchrotrons, free-electron lasers, plasma-based soft X-ray lasers and high harmonic generation. Our most recent developments include the realization of a EUV sensor adapted to strongly convergent or divergent beams having numerical aperture as high as 0.15, as well as the production of a hard X-ray sensor working above 10 keV, providing outstanding repeatability as good as 4 pm rms. Our sensors have demonstrated their high usefulness for the metrology of EUV to X-ray optics from single flat or curved mirrors to more complex optical systems (Schwarzschild, Kirkpatrick-Baez static or based on bender technology or with activators). In terms of optics qualification is a clear advantage of actually measuring the wavefront at-wavelength. Also, we show active Kirkpatrick-Baez alignment in few minutes using our WF sensor in both manual and automatic loops at the benefit of strong improvement of the beam focalization on the sample. Recently we started developing our own compact deformable grazing incidence mirror bender. We present a review of the developed sensors, as well as experimental demonstrations of their benefits for optical metrology of various EUV and X-ray optics.

Conference Presentation

Citation Download Citation

Ombeline de La Rochefoucauld, Samuel Bucourt, Daniele Cocco, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Dietmar Korn, Xavier Levecq, Martin Piponnier, Rakchanok Rungsawang, Lorenzo Raimondi, and Philippe Zeitoun "EUV/X-ray Hartmann wavefront sensors and adaptive optics at Imagine Optic (Conference Presentation)", Proc. SPIE 11032, EUV and X-ray Optics: Synergy between Laboratory and Space VI, 1103207 (13 May 2019); https://doi.org/10.1117/12.2522510

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
PRESENTATION

WATCH
PRESENTATION SAVE TO MY LIBRARY

GET CITATION

KEYWORDS

Adaptive optics

Optics manufacturing

Sensors

Wavefront sensors

Extreme ultraviolet

X-ray optics

Metrology

Show All Keywords

Keywords/Phrases

Search In:

Publication Years