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A novel fabrication method for apodized diffractive structures is proposed and examined experimentally and theoretically. It combines the principles of Laser Interference Lithography and a moiré effect in order to create high-quality subwavelength gratings with 2D adiabatic variation of depth. Synthesized structures can be used in optical security systems, plasmonic research and high-effective light couplers.
Andrei A. Ushkov,Isabelle Verrier,Thomas Kampfe, andYves Jourlin
"Moiré effects in subwavelength gratings: apodized structures for visible band optical applications", Proc. SPIE 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 1136415 (2 April 2020); https://doi.org/10.1117/12.2559292
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Andrei A. Ushkov, Isabelle Verrier, Thomas Kampfe, Yves Jourlin, "Moiré effects in subwavelength gratings: apodized structures for visible band optical applications," Proc. SPIE 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications, 1136415 (2 April 2020); https://doi.org/10.1117/12.2559292