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30 April 2021 Efficient generation of super-Gaussian short-axis profiles in UV line-beam systems
Henning Kalis, Florian Seck, Fabian Gaußmann, Mikhail Ivanenko, Vyacheslav Grimm, Markus Wiesner
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Proceedings Volume 11672, Laser Resonators, Microresonators, and Beam Control XXIII; 116720X (2021) https://doi.org/10.1117/12.2580153
Event: SPIE LASE, 2021, Online Only
Abstract
Beam-shaping of homogeneous line profiles at ultra-violet wavelengths has wide applicability in the flat-panel display industry. Besides the well-established Excimer-Laser-based setups, diode-pumped-solid-state lasers with high repetition rates and comparatively small pulse energies have proven to be capable of providing a cost-effective alternative for different process steps e.g. Laser-Lift-Off or Solid-State-Laser-Annealing. We give a short summary about challenges emerging during the design of these system and demonstrate the generation of state-of-the-art laser-lines, offering a super-Gaussian, top-hat-shaped short-axis profile..
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Henning Kalis, Florian Seck, Fabian Gaußmann, Mikhail Ivanenko, Vyacheslav Grimm, and Markus Wiesner "Efficient generation of super-Gaussian short-axis profiles in UV line-beam systems", Proc. SPIE 11672, Laser Resonators, Microresonators, and Beam Control XXIII, 116720X (30 April 2021); https://doi.org/10.1117/12.2580153
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KEYWORDS
Ultraviolet radiation
Materials processing
Solid state lasers
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