Dr. Henning Kalis Profile

Dr. Henning Kalis

at ASML

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Publications (3)

Proceedings Article | 6 May 2021 Presentation + Paper

Towards solid state laser annealing: interference suppression by non-periodic homogenizers suitable for high-power applications

Florian Seck, Henning Kalis, Mikhail Ivanenko, Vyacheslav Grimm

Proceedings Volume 11672, 116720Z (2021) https://doi.org/10.1117/12.2582659

KEYWORDS: Modulation, Microscopy, Lithography, Lithographic illumination, Solid state lasers, High power lasers, Annealing, Staring arrays, Eye, Optical coatings

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Proceedings Article | 30 April 2021 Presentation + Paper

Efficient generation of super-Gaussian short-axis profiles in UV line-beam systems

Henning Kalis, Florian Seck, Fabian Gaußmann, Mikhail Ivanenko, Vyacheslav Grimm, Markus Wiesner

Proceedings Volume 11672, 116720X (2021) https://doi.org/10.1117/12.2580153

KEYWORDS: Ultraviolet radiation, Solid state lasers, Materials processing

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Proceedings Article | 15 February 2018 Presentation + Paper

Tuneable UV solid-state laser lines for surface processing

Mikhail Ivanenko, Vyacheslav Grimm, Fabian Gaussmann, Henning Kalis, Markus Wiesner

Proceedings Volume 10525, 1052505 (2018) https://doi.org/10.1117/12.2287382

KEYWORDS: Ultraviolet radiation, Diode pumped solid state lasers, Excimer lasers, Laser liftoff, Pulsed laser operation, Beam shaping, Solid state lasers, Laser processing, Manufacturing

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