Towards solid state laser annealing: interference suppression by non-periodic homogenizers suitable for high-power applications

Florian Seck; Henning Kalis; Mikhail Ivanenko; Vyacheslav Grimm

doi:10.1117/12.2582659

6 May 2021 Towards solid state laser annealing: interference suppression by non-periodic homogenizers suitable for high-power applications

Florian Seck, Henning Kalis, Mikhail Ivanenko, Vyacheslav Grimm

Author Affiliations +

Proceedings Volume 11672, Laser Resonators, Microresonators, and Beam Control XXIII; 116720Z (2021) https://doi.org/10.1117/12.2582659
Event: SPIE LASE, 2021, Online Only

Abstract

Using fly’s eye homogenizer has proven applicability in various fields, ranging from early-stage microscopy to state-of- the-art lithography. Hereby periodic lens arrays are commonly used to form a homogenous top -hat distribution. In turn, this periodicity can limit the attainable homogeneity by interference based micro - inhomogeneities. Furthermore, the positioning of the lens arrays results in small spot sizes directly at the lens surface, compromising functionality for large pulse energies. Here we present the challenges emerging due to the usage of non-periodic lens-arrays and introduce our design concept, suppressing interference based micro-inhomogeneities while being suitable for applications with large pulse energies.

Conference Presentation

Citation Download Citation

Florian Seck, Henning Kalis, Mikhail Ivanenko, and Vyacheslav Grimm "Towards solid state laser annealing: interference suppression by non-periodic homogenizers suitable for high-power applications", Proc. SPIE 11672, Laser Resonators, Microresonators, and Beam Control XXIII, 116720Z (6 May 2021); https://doi.org/10.1117/12.2582659

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