Ultrafast laser ablation by bi-bursts in MHz and GHz pulse repetition rate

Andrius Žemaitis; Mantas Gaidys; Paulius Gečys; Gediminas Račiukaitis; Mindaugas Gedvilas

doi:10.1117/12.2574838

5 March 2021 Ultrafast laser ablation by bi-bursts in MHz and GHz pulse repetition rate

Andrius Žemaitis, Mantas Gaidys, Paulius Gečys, Gediminas Račiukaitis, Mindaugas Gedvilas

Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 1167309 (2021) https://doi.org/10.1117/12.2574838
Event: SPIE LASE, 2021, Online Only

Abstract

Femtosecond laser (Pharos, Light Conversion) with the possibility to produce bi-burst pulses with a repetition rate of 64.5 MHz or/and 4.88 GHz was used to structure copper and steel samples. Ablation efficiency and quality were studied by varying number of pulses per burst in conventional burst regimes and in the bi-burst mode. The comparison of burst, bi-burst and single-pulse ablation efficiencies was done for beam-size-optimised regimes, showing the real advantages and disadvantages of milling and drilling processing approaches.

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Citation Download Citation

Andrius Žemaitis, Mantas Gaidys, Paulius Gečys, Gediminas Račiukaitis, and Mindaugas Gedvilas "Ultrafast laser ablation by bi-bursts in MHz and GHz pulse repetition rate", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 1167309 (5 March 2021); https://doi.org/10.1117/12.2574838

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