Geometric measurement error tests on multi-regular particle shapes with the use of scanning electron microscope

Sen Zhou; Jian Xu; Ying Li; Cong Yue

doi:10.1117/12.2645474

19 December 2022 Geometric measurement error tests on multi-regular particle shapes with the use of scanning electron microscope

Sen Zhou, Jian Xu, Ying Li, Cong Yue

Author Affiliations +

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123190Q (2022) https://doi.org/10.1117/12.2645474
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

Scanning electron microscope have been widely studied in academia and applied in engine wear monitoring, geology, air cleanliness and pollution, because of the benefits of fast massive acquisition of nano-scale features, non-contact operation, and automatic data processing. It is important to have an automated analysis ability to get a deeper understanding on geometric features of multi-regulars shape of different particles, thus offering a significantly enhanced user experience and higher measurement accuracy. Hence, it should be carried out geometric measurement error tests before using. In this paper, several different shapes of particle were introduced to test geometric measurement error on a commercial SEM with specific particle analysis software. Several experimental cases have been designed by considered of practical application and user habits. Specially, the distinguish accuracy rate of a single threshold and multiple threshold were respectively tested by different types of particles. On the other hand, the ability of automatically classification schemes using the chemical and morphological information was taken in account too. Our scope was indeed narrow, but intentionally so. Finally, we found that these work may be of use to others who perform similar

Citation Download Citation

Sen Zhou, Jian Xu, Ying Li, and Cong Yue "Geometric measurement error tests on multi-regular particle shapes with the use of scanning electron microscope", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123190Q (19 December 2022); https://doi.org/10.1117/12.2645474

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available