Investigation of manufacturing techniques to develop controlled flaws for x-ray computed tomography reliability assessment

F. H. Kim; S. M. Robinson; N. N. Klimov; J. H. J. Scott

doi:10.1117/12.2660458

25 April 2023 Investigation of manufacturing techniques to develop controlled flaws for x-ray computed tomography reliability assessment

F. H. Kim, S. M. Robinson, N. N. Klimov, J. H. J. Scott

Author Affiliations +

Proceedings Volume 12491, 8th International Workshop on Reliability of NDT/NDE; 1249108 (2023) https://doi.org/10.1117/12.2660458
Event: SPIE Smart Structures + Nondestructive Evaluation, 2023, Long Beach, California, United States

Abstract

Various micro and nano-manufacturing techniques were investigated to create controlled flaws for x-ray computed tomography (XCT) phantoms. We explored the use of focused ion beam, laser micromachining, and projection photolithography with deep reactive ion etching to generate controlled pores from 100s of micrometers to a few micrometers in size. Principles of each technique, fabrication results, and the calibration processes for the manufactured pores are discussed, as well as possible assembly techniques for building up larger pore-containing structure and initial results for such assemblies. Example scanning electron microscope and XCT measurements of the phantoms are shown.

Conference Presentation

Citation Download Citation

F. H. Kim, S. M. Robinson, N. N. Klimov, and J. H. J. Scott "Investigation of manufacturing techniques to develop controlled flaws for x-ray computed tomography reliability assessment ", Proc. SPIE 12491, 8th International Workshop on Reliability of NDT/NDE, 1249108 (25 April 2023); https://doi.org/10.1117/12.2660458

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