Dr. Sarah M. Robinson
at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 25 April 2023 Presentation + Paper
F. Kim, S. Robinson, N. Klimov, J. H. Scott
Proceedings Volume 12491, 1249108 (2023) https://doi.org/10.1117/12.2660458
KEYWORDS: Manufacturing, Micromachining, Silicon, Scanning electron microscopy, Deep reactive ion etching, X-ray computed tomography, Laser ablation, Ion beams, Image segmentation, Beam diameter, Defect detection, Defect inspection, Reliability, Additive manufacturing, Nanofabrication

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