Characteristics analysis of fused silica material and experimental research on polishing removal efficiency

Qiancai Wei; Fei Fan; Bo Zhong; Nan Zheng; Jian Wang

doi:10.1117/12.3024180

18 March 2024 Characteristics analysis of fused silica material and experimental research on polishing removal efficiency

Qiancai Wei, Fei Fan, Bo Zhong, Nan Zheng, Jian Wang

Author Affiliations +

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 1310475 (2024) https://doi.org/10.1117/12.3024180
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

In view of the problem that various fused silica materials have different characteristics, which could cause differences in processability, the mechanical properties of fused silica materials were studied through nanoindentation experiments. Relationship curves between indentation load and material hardness/elastic modulus were obtained for different fused silica optics. The fracture characteristics of fused silica materials were also studied using the gradient force imprinting method, and the fracture toughness and critical load of crack generation were calculated for different fused silica materials. The ability of different fused silica materials to resist crack instability prop agation under the same process conditions was also clarified. Furthermore, the polishing removal characteristics of fused silica materials were researched, and the polishing removal efficiency of different materials was obtained through the magnetorheologi cal finishing (MRF) spotting method. It was further verified that the hardness was positively correlated with the material polishing removal efficiency. Based on the characteristics of different fused silica materials, the optical ultra -precision processing parameters could be selected. This is of great significance for low -defect and high-efficiency ultra-precision machining of optics.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Qiancai Wei, Fei Fan, Bo Zhong, Nan Zheng, and Jian Wang "Characteristics analysis of fused silica material and experimental research on polishing removal efficiency", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 1310475 (18 March 2024); https://doi.org/10.1117/12.3024180

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KEYWORDS

Silica

Polishing

Elastic modulus

Magnetorheological finishing

Optical surfaces

Surface finishing

Analytical research

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