Basic mechanisms and application of the laser-induced forward transfer for high-Tc superconducting thin film deposition

Eric Fogarassy

doi:10.1117/12.25743

1 March 1991 Basic mechanisms and application of the laser-induced forward transfer for high-T_c superconducting thin film deposition

Eric Fogarassy

Author Affiliations +

Proceedings Volume 1394, Progress In High-Temperature Superconducting Transistors and Other Devices; (1991) https://doi.org/10.1117/12.25743
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

In this work, we detail the basic mechanisms and potential applications of the Laser Induced Forward Transfer (LIFT) for the rapid deposition and patterning in a clean environment, of high Tc superconducting thin films. With the LIFT technique, a stoichiometric oxide superconductor compound is initially deposited in a thin layer on an optically transparent support. By irradiating, under vacuum or in air, this precoated layer with a strongly absorbed single laser pulse through the transparent support, we are able to remove the film from its support to be transferred onto a selected target substrate, held in contact or close to the original film. The mechanisms for transferring YBaCuO and BiSrCaCuO thin films, with a pulsed UV excimer laser are described using a thermal melting model based on the resolution of the heat flow equation. The various possibilities given by the LIFT technique for patterning high Tc films (mask and direct patterning) are also examined.

Citation Download Citation

Eric Fogarassy "Basic mechanisms and application of the laser-induced forward transfer for high-T_c superconducting thin film deposition", Proc. SPIE 1394, Progress In High-Temperature Superconducting Transistors and Other Devices, (1 March 1991); https://doi.org/10.1117/12.25743

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available