Cost and yield estimation in a virtual IC factory

Valery Axelrad; Yuri Granik; Victor V. Boksha; J. G. Rollins

doi:10.1117/12.186767

14 September 1994 Cost and yield estimation in a virtual IC factory

Valery Axelrad, Yuri Granik, Victor V. Boksha, J. G. Rollins

Proceedings Volume 2334, Microelectronics Manufacturability, Yield, and Reliability; (1994) https://doi.org/10.1117/12.186767
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

A methodology to include cost and yield estimation in a comprehensive TCAD model of semiconductor processing is presented. The underlying idea is that a process recipe used to drive TCAD simulators contains a complete set of information about the process. If it is combined with empirical equipment data, a set of models can be constructed to describe cost as a function of the process recipe and equipment data. This paper presents a user-configurable cost modeling tool tightly integrated with TCAD simulators, enabling the user to study related and important questions of cost and yield not covered by traditional TCAD tools.

Citation Download Citation

Valery Axelrad, Yuri Granik, Victor V. Boksha, and J. G. Rollins "Cost and yield estimation in a virtual IC factory", Proc. SPIE 2334, Microelectronics Manufacturability, Yield, and Reliability, (14 September 1994); https://doi.org/10.1117/12.186767

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