Automated cost of ownership analysis for process development

Vidar K. Nilsen; Anthony J. Walton

doi:10.1117/12.346235

23 April 1999 Automated cost of ownership analysis for process development

Vidar K. Nilsen, Anthony J. Walton

Proceedings Volume 3742, Process and Equipment Control in Microelectronic Manufacturing; (1999) https://doi.org/10.1117/12.346235
Event: Microelectronic Manufacturing Technologies, 1999, Edinburgh, United Kingdom

Abstract

This paper describes how costings analysis can be incorporated into a framework for process development. It describes how Cost of Ownership can be calculated from the information stored within existing process development tools through the use of CASTT (Cost Analysis in Total TCAD). It provides a method by which manufacturing costs can be forecast and alternative processing options can be compared. The existing elements of Total TCAD framework are described, an outline of the CASTT software is then given and examples are used to illustrate its potential.

Citation Download Citation

Vidar K. Nilsen and Anthony J. Walton "Automated cost of ownership analysis for process development", Proc. SPIE 3742, Process and Equipment Control in Microelectronic Manufacturing, (23 April 1999); https://doi.org/10.1117/12.346235

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