Smart detectors: devices, integration, circuits, and systems

Nan Marie Jokerst; Martin A. Brooke; Olivier Vendier; Myunghee Lee; Suzanne M. Fike; Brent Buchanan; D. Scott Wills

doi:10.1117/12.221402

26 September 1995 Smart detectors: devices, integration, circuits, and systems

Nan Marie Jokerst, Martin A. Brooke, Olivier Vendier, Myunghee Lee, Suzanne M. Fike, Brent Buchanan, D. Scott Wills

Proceedings Volume 2550, Photodetectors and Power Meters II; (1995) https://doi.org/10.1117/12.221402
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The fabrication and performance of thin film p-i-n and metal-semiconductor-metal (MSM) photodetectors and the integration of these detectors onto silicon circuitry is presented. The thin film photodetectors are separated from the growth substrate using epitaxial lift off or total substrate removal, and are subsequently bonded to silicon circuits. Performance of the thin film photodetectors is comparable to on-wafer counterparts, and in the cases of resonant cavity p-i-ns and inverted (fingers on the bottom) MSMs, the performance is enhanced through the removal of the substrate. Receiver circuits have been designed, integrated with thin film photodetectors, and tested. Finally, smart pixel arrays of photodetectors have been integrated directly on top of an array of silicon oscillator circuits to demonstrate three dimensionally interconnected image processing systems.

Citation Download Citation

Nan Marie Jokerst, Martin A. Brooke, Olivier Vendier, Myunghee Lee, Suzanne M. Fike, Brent Buchanan, and D. Scott Wills "Smart detectors: devices, integration, circuits, and systems", Proc. SPIE 2550, Photodetectors and Power Meters II, (26 September 1995); https://doi.org/10.1117/12.221402

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available