Diffusivity measurements in polymers: I. Lithographic modeling results

Chris A. Mack; Katherine E. Mueller; Allen B. Gardiner; Anwei Qin; Ralph R. Dammel; William J. Koros; C. Grant Willson

doi:10.1117/12.275906

7 July 1997 Diffusivity measurements in polymers: I. Lithographic modeling results

Chris A. Mack, Katherine E. Mueller, Allen B. Gardiner, Anwei Qin, Ralph R. Dammel, William J. Koros, C. Grant Willson

Proceedings Volume 3049, Advances in Resist Technology and Processing XIV; (1997) https://doi.org/10.1117/12.275906
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

A first-principles study into the effects of residual casting solvent on the lithographic properties of photoresist has been initiated. Solvent content has been measured using a quartz crystal microbalance and using radio-labeled solvent with scintillation counting. Resists of measured solvent content were then tested for their dissolution properties. Early results have been presented which show the expected strong relationship between solvent content and dissolution rate. Incorporation of these results into lithographic simulation allows the prediction of resist linewidth as a function of post apply bake conditions.

Citation Download Citation

Chris A. Mack, Katherine E. Mueller, Allen B. Gardiner, Anwei Qin, Ralph R. Dammel, William J. Koros, and C. Grant Willson "Diffusivity measurements in polymers: I. Lithographic modeling results", Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); https://doi.org/10.1117/12.275906

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available