Development of silicon microheaters for chemoresistive gas sensors

Sebastiano Brida; Lorenza Ferrario; Flavio Giacomozzi; Domenico Giusti; Vittorio Guarnieri; Benno Margesin; Giorgio U. Pignatel; Giovanni Soncini; Alexey N. Vasil'ev; Giovanni Verzellesi; Mario Zen

doi:10.1117/12.341164

10 March 1999 Development of silicon microheaters for chemoresistive gas sensors

Sebastiano Brida, Lorenza Ferrario, Flavio Giacomozzi, Domenico Giusti, Vittorio Guarnieri, Benno Margesin, Giorgio U. Pignatel, Giovanni Soncini, Alexey N. Vasil'ev, Giovanni Verzellesi, Mario Zen

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341164
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

We report on the design, fabrication, and characterization of a microheater module for chemoresistive, metal-oxide semiconductor gas sensors, consisting of a dielectric stacked membrane, micromachined from bulk silicon and with an embedded polysilicon resistor heater. Fabricated structures exhibit excellent heating efficiency, requiring only 30 mW to achieve a temperature of 500 C. Measured electrothermal characteristics are in good agreement with the outcomes of 3D numerical simulations.

Citation Download Citation

Sebastiano Brida, Lorenza Ferrario, Flavio Giacomozzi, Domenico Giusti, Vittorio Guarnieri, Benno Margesin, Giorgio U. Pignatel, Giovanni Soncini, Alexey N. Vasil'ev, Giovanni Verzellesi, and Mario Zen "Development of silicon microheaters for chemoresistive gas sensors", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341164

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