Compatibility of gas and flow sensor technology fabrication

Neus Sabate; Isabel Gracia; Carles Cane; Jordi Puigcorbe; Judith Cerda; Joan Ramon Morante; Javier Berganzo

doi:10.1117/12.498995

24 April 2003 Compatibility of gas and flow sensor technology fabrication

Neus Sabate, Isabel Gracia, Carles Cane, Jordi Puigcorbe, Judith Cerda, Joan Ramon Morante, Javier Berganzo

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.498995
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

The requirements of flow measurement and control in the home-appliances field lead to the need of a measurement system able to monitor the flow and the quality of gas. The integration of a set of sensors with different functionalities on a single chip arises as an advantageous solution. In this paper, the description of the structures and technologies required for the gas, flow and temperature sensor devices is presented prior to the complete description of the process flow for the full on-chip compatibilization. In this sense, semiconductor gas sensors and thermal flow sensors have arisen as the best candidates to address the compatibilization.

Citation Download Citation

Neus Sabate, Isabel Gracia, Carles Cane, Jordi Puigcorbe, Judith Cerda, Joan Ramon Morante, and Javier Berganzo "Compatibility of gas and flow sensor technology fabrication", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.498995

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