Generation of large-area microscale manifolds using excimer laser ablation

Simon Zhou; Marvin M. Kilgo III; Charles N. Williams

doi:10.1117/12.359342

19 August 1999 Generation of large-area microscale manifolds using excimer laser ablation

Simon Zhou, Marvin M. Kilgo III, Charles N. Williams

Proceedings Volume 3877, Microfluidic Devices and Systems II; (1999) https://doi.org/10.1117/12.359342
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Excimer laser ablation of polymeric materials is a widely used technology for the generation of nozzles and through- holes. Ablation is also a viable process to create more complex fluidic structures such as channels and manifolds. This paper presents recent results of experiments demonstrating the creation of manifolds in 25 micrometers polyimide films. These structures include cross-over points, and channels of various widths. The results presented include photomicrographs and SEMS, and characterization of channel wall taper and width control as well as an assessment of ablation depth uniformity over large fields. The characteristics of projection ablation systems are reviewed, and the experimental system is described in detail.

Citation Download Citation

Simon Zhou, Marvin M. Kilgo III, and Charles N. Williams "Generation of large-area microscale manifolds using excimer laser ablation", Proc. SPIE 3877, Microfluidic Devices and Systems II, (19 August 1999); https://doi.org/10.1117/12.359342

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