Design and analysis of a micro-optical position readout for acceleration sensing

Richard N. Shagam; Fred M. Dickey; Scott C. Holswade

doi:10.1117/12.361275

2 September 1999 Design and analysis of a micro-optical position readout for acceleration sensing

Richard N. Shagam, Fred M. Dickey, Scott C. Holswade

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361275
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Sandia National Laboratories is developing a MEMS-based trajectory safety subsystem, which allows enablement of critical functions only after a particular acceleration environment has been achieved. The device, known as an Environmental Sensing Device (ESD), consists of a suspended moving shuttle that translates a given distance when exposed to an appropriate acceleration environment. The shuttle contains an embedded code, consisting of grating structures, hat is illuminated and optically read using a semiconductor laser and detector integrated together in a GaAs-based Photonic Integrated Circuit (PIC) flip-chip bonded to the assembly. This paper will describe the optical design and performance analysis of the embedded code features in the shuttle.

Citation Download Citation

Richard N. Shagam, Fred M. Dickey, and Scott C. Holswade "Design and analysis of a micro-optical position readout for acceleration sensing", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361275

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