One-dimensional vibration sensor using a Si-cantilever coupled with an optical fiber

Katsuhisa Toshima; Harunobu Sato; Mitsuteru Kimura

doi:10.1117/12.361279

2 September 1999 One-dimensional vibration sensor using a Si-cantilever coupled with an optical fiber

Katsuhisa Toshima, Harunobu Sato, Mitsuteru Kimura

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361279
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

A new type all optical vibration and acceleration sensor using the combination of micromachined Si cantilever and optical fiber is proposed, and its fundamental characteristics are demonstrated. The light emitted from bulb-lens set into the V- groove is reflected at the reflector formed on the Si cantilever and then recoupled into the bulb-lens. Several sensors with different length (0.64 - 6.0 mm long) of the Si cantilever are fabricated to compare the theoretical resonance frequency fr obtained from the simple model and experimental ones. They had good agreement. From the sensing principle the sensing frequency range of the vibration is suitable below the fr of the Si cantilever of the sensor.

Citation Download Citation

Katsuhisa Toshima, Harunobu Sato, and Mitsuteru Kimura "One-dimensional vibration sensor using a Si-cantilever coupled with an optical fiber", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361279

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