Thin film thermal sensor fabrication and application

Hamid Gualous

doi:10.1117/12.364488

1 October 1999 Thin film thermal sensor fabrication and application

Hamid Gualous

Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364488
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

This paper is about a gold palladium thin-film microthermocouple gate array. The gate array is fabricated by standard photolithography and sputtering technology. The sensor has been developed to characterize the energetic profile of laser power. The thermal sensor is a thin film thermocouple gate array with 16 sensing junctions per 288 micrometers . The response of Au/Pd thin-film thermocouple has been characterized, the time constant of thermocouple response is in order of 140 microsecond(s) . Furthermore, a linear graph giving the thermoelastic voltage versus the incident power laser has been obtained. Finally, the spot size and the intensity profile of laser beam have been estimated using the sensor.

Citation Download Citation

Hamid Gualous "Thin film thermal sensor fabrication and application", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364488

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