Detectivity of thin film NTC infrared sensors

Moon-Ho Lee; Mina Yoo; Seong-Ho Bae; Hyun-Jin Shin

doi:10.1117/12.429431

12 June 2001 Detectivity of thin film NTC infrared sensors

Moon-Ho Lee, Mina Yoo, Seong-Ho Bae, Hyun-Jin Shin

Proceedings Volume 4288, Photodetectors: Materials and Devices VI; (2001) https://doi.org/10.1117/12.429431
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

Characteristics of thin-film NTC infrared sensors fabricated by micromaching technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/SiO_x/(100)Si. NTC film of Mn_1.5CoNi_0.5O₃ with 0.5 micrometers in thickness was deposited on SiO_x layer (1.2 mm) by PLD (pulsed laser deposition) and annealed at 600-800 degree(s)C in air for 1h. Au (400nm)/Ti (100nm) electrode was coated on NTC film by dc sputtering. By the results of microstructural, X-ray and NTC analysis, post-annealed NTC films at 700 degree(s)C for 1h showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65mm. Sensors with thin sensing membrane show the good detecting characteristics.

Citation Download Citation

Moon-Ho Lee, Mina Yoo, Seong-Ho Bae, and Hyun-Jin Shin "Detectivity of thin film NTC infrared sensors", Proc. SPIE 4288, Photodetectors: Materials and Devices VI, (12 June 2001); https://doi.org/10.1117/12.429431

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available