Cluster tool for photomask inspection and qualification at 150-nm design rules and beyond

Kai Peter; Volodymyr Ordynskyy; Christoph Dolainsky; Hans Hartmann; Hans-Juergen Brueck

doi:10.1117/12.377100

3 February 2000 Cluster tool for photomask inspection and qualification at 150-nm design rules and beyond

Kai Peter, Volodymyr Ordynskyy, Christoph Dolainsky, Hans Hartmann, Hans-Juergen Brueck

Proceedings Volume 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents; (2000) https://doi.org/10.1117/12.377100
Event: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, 1999, Munich, Germany

Abstract

The reduction of the wave length in the optical lithography in combination with mask enhancement techniques like phase shift pattern, optical proximity correction (OPC) or off- axis illumination requires a rapid increase in measurement accuracy and cost effective qualification of advanced photo masks. The knowledge about the impact of CD deviations, loss of pattern fidelity--especially of OPC structures--and mask defects on wafer level in more and more essential for mask qualification.

Citation Download Citation

Kai Peter, Volodymyr Ordynskyy, Christoph Dolainsky, Hans Hartmann, and Hans-Juergen Brueck "Cluster tool for photomask inspection and qualification at 150-nm design rules and beyond", Proc. SPIE 3996, 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents, (3 February 2000); https://doi.org/10.1117/12.377100

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available