Mechanism-dependent resolution for protein micro/nano-patterning

Dan V. Nicolau

doi:10.1117/12.388330

23 June 2000 Mechanism-dependent resolution for protein micro/nano-patterning

Dan V. Nicolau

Proceedings Volume 3999, Advances in Resist Technology and Processing XVII; (2000) https://doi.org/10.1117/12.388330
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

The resolution of the protein patterning on polymer surfaces is modulated by the mechanism of attachment. Two mechanisms can be applied for the high resolution patterning on radiation-assisted functionalized polymer surfaces: hydrophobicity-controlled; and chemical linkage patterning. The present contribution assesses the merits and drawbacks of these two mechanisms in terms of resolution and contrast of protein/peptide features. Two microlithographic materials (an acrylate-based system and a diazo-naphto-quinone one); and two lithographic methods (e-beam and optical) have been used to test the merits of the protein patterning mechanisms. Finally these two 'model' materials have been used in a bi-layer architecture. The hydrophobicity-controlled patterning produces sharp images but with multiple defects, whereas chemical linkage produces defect-free images but with a decreased contrast.

Citation Download Citation

Dan V. Nicolau "Mechanism-dependent resolution for protein micro/nano-patterning", Proc. SPIE 3999, Advances in Resist Technology and Processing XVII, (23 June 2000); https://doi.org/10.1117/12.388330

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