Optical radiation pressure micromachining using a small particle

Hiroki Shimizu; Takashi Miyoshi; Satoshi Kiyono

doi:10.1117/12.405733

6 November 2000 Optical radiation pressure micromachining using a small particle

Hiroki Shimizu, Takashi Miyoshi, Satoshi Kiyono

Proceedings Volume 4088, First International Symposium on Laser Precision Microfabrication; (2000) https://doi.org/10.1117/12.405733
Event: First International Symposium on Laser Precision Microfabrication (LPM2000), 2000, Omiya, Saitama, Japan

Abstract

This paper presents a new micro-machining using optical radiation pressure induced by incident laser light, which is based on laser trapping technology. In order to verify the feasibility of our proposed new micro-machining, we construct the experimental system and carry out the fundamental experiments. As a result, we found that the proposed micro-machining will make it possible to remove effectively the surface up to the depth of several nm using the particles trapped by the optical radiation pressure, even if the pressure force is as small as 0.1nN.

Citation Download Citation

Hiroki Shimizu, Takashi Miyoshi, and Satoshi Kiyono "Optical radiation pressure micromachining using a small particle", Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); https://doi.org/10.1117/12.405733

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available