Particle-enhanced near-field optical effect and laser writing for nanostructure fabrication

Yongfeng Lu; L. Zhang; Wen Dong Song; Yuan Wei Zheng; Boris S. Luk'yanchuk

doi:10.1117/12.456865

25 February 2002 Particle-enhanced near-field optical effect and laser writing for nanostructure fabrication

Yongfeng Lu, L. Zhang, Wen Dong Song, Yuan Wei Zheng, Boris S. Luk'yanchuk

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456865
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

In this paper, we present a novel method of nanostructure fabrication using particle-enhanced near-field optical effect and lasers. For this purpose, spherical silica particles were deposited on a silicon surface. After laser illumination, hillocks with size of about 150 nm were obtained at the original position of the particles. The mechanism can be explained as the enhancement of light intensity near the contact area. Since the characteristic distance between particles and substrate is smaller than the radiation wavelength and the particle size is of the order of a wavelength, particle does not simply play the role of microfocusing lens as in far-field, but possess optical resonance effect in near-field. In our work, the light intensity on the surface under the spherical particle was calculated by solving the electromagnetic boundary problem 'particle on surface.'

Citation Download Citation

Yongfeng Lu, L. Zhang, Wen Dong Song, Yuan Wei Zheng, and Boris S. Luk'yanchuk "Particle-enhanced near-field optical effect and laser writing for nanostructure fabrication", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456865

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