Methods used to streamline data preparation for memory products

Paul DePesa; Wolfgang Leitermann

doi:10.1117/12.410685

22 January 2001 Methods used to streamline data preparation for memory products

Paul DePesa, Wolfgang Leitermann

Proceedings Volume 4186, 20th Annual BACUS Symposium on Photomask Technology; (2001) https://doi.org/10.1117/12.410685
Event: Photomask Technology, 2000, Monterey, CA, United States

Abstract

Historically the transcription of design data, in preparation for mask manufacture, has been to produce flat exposure tool data. Recent developments in hierarchical fracturing in the CATSTM tool are reviewed and explained. Current design data, especially memory products or even microprocessors containing cache, benefit immensely from these developments. The pertinent CATSTM commands are reviewed. Records of typical data fractures are presented and reviewed, showing the overall decrease in CPU usage with the hierarchal methods. The concomitant decrease in file sizes is also shown.

Citation Download Citation

Paul DePesa and Wolfgang Leitermann "Methods used to streamline data preparation for memory products", Proc. SPIE 4186, 20th Annual BACUS Symposium on Photomask Technology, (22 January 2001); https://doi.org/10.1117/12.410685

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