Monte Carlo model of charging in resists in e-beam lithography

Yeong-Uk Ko; David C. Joy

doi:10.1117/12.436751

22 August 2001 Monte Carlo model of charging in resists in e-beam lithography

Yeong-Uk Ko, David C. Joy

Proceedings Volume 4344, Metrology, Inspection, and Process Control for Microlithography XV; (2001) https://doi.org/10.1117/12.436751
Event: 26th Annual International Symposium on Microlithography, 2001, Santa Clara, CA, United States

Abstract

Charging effects on beam deflection of incident electrons in electron beam lithography are investigated. We show first in detail how the non-unity yield of electron generation in insulator resists leads to local charging accumulation and affects the beam deflection of incident electrons as charging develops. Then the amounts of beam deflection are identified for various operating and resist dimension conditions, and then we conclude that the beam deflection should be avoided for more accurate manufacturing semiconductor devices by the control of charging effects.

Citation Download Citation

Yeong-Uk Ko and David C. Joy "Monte Carlo model of charging in resists in e-beam lithography", Proc. SPIE 4344, Metrology, Inspection, and Process Control for Microlithography XV, (22 August 2001); https://doi.org/10.1117/12.436751

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