Exact computation of scalar 2D aerial imagery

Ronald L. Gordon

doi:10.1117/12.475687

12 July 2002 Exact computation of scalar 2D aerial imagery

Ronald L. Gordon

Proceedings Volume 4692, Design, Process Integration, and Characterization for Microelectronics; (2002) https://doi.org/10.1117/12.475687
Event: Design, Process Integration, and Characterization for Microelectronics, 2002, Santa Clara, CA, United States

Abstract

An exact formulation of the problem of imaging a 2D object through a Koehler illumination system is presented; the accurate simulation of a real layout is then not time- limited but memory-limited. The main idea behind the algorithm is that the boundary of the region that comprise a typical TCC Is made up of circular arcs, and therefore the area - which determines the value of the TCC - should be exactly computable in terms of elementary analytical functions. A change to integration around the boundary leads to an expression with minimal dependence on expensive functions such as arctangents and square roots. Numerical comparisons are made for a simple 2D structure.

Citation Download Citation

Ronald L. Gordon "Exact computation of scalar 2D aerial imagery", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, (12 July 2002); https://doi.org/10.1117/12.475687

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