Micro Materials Center Berlin: reliability research for MEMS

Bernd Michel; Thomas Winkler

doi:10.1117/12.469614

7 June 2002 Micromaterials Center Berlin: reliability research for MEMS

Bernd Michel, Thomas Winkler

Proceedings Volume 4703, Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems; (2002) https://doi.org/10.1117/12.469614
Event: NDE For Health Monitoring and Diagnostics, 2002, San Diego, California, United States

Abstract

The Micro Materials Center Berlin (MMCB) located at the Fraunhofer Institute IZM belongs to three German Centers for Materials Research in Microtechnology funded by the German Ministry for Education and Research (BMBF). The paper presents some recent results obtained in the field of electronic packaging for MEMS. A survey is given concerning advanced interconnection technologies (chip size packaging, BGA, wafer level packaging etc.) taking into account new developments in the field of materials research for packaging in various applications, e.g. in automotive and telecommunication systems. Special attention will be given to overcome the reliability gap which can be found in the field of microsystem reliability (e.g. high temperature electronics, lead-free solder applications in MEMS etc.). The authors present recent results obtained in the different branch labs of MMCB situated in Berlin, Munich, Chemnitz, Oberpfaffenhofen, and Teltow. New fields of applications are dealt with e.g. polytronics, micromechatronics.

Citation Download Citation

Bernd Michel and Thomas Winkler "Micromaterials Center Berlin: reliability research for MEMS", Proc. SPIE 4703, Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems, (7 June 2002); https://doi.org/10.1117/12.469614

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available