Thermal wave phase and amplitude measurements of thin metal films thickness

A. V. Reznikov

doi:10.1117/12.464471

1 April 2002 Thermal wave phase and amplitude measurements of thin metal films thickness

A. V. Reznikov

Proceedings Volume 4750, ICONO 2001: Quantum and Atomic Optics, High-Precision Measurements in Optics, and Optical Information Processing, Transmission, and Storage; (2002) https://doi.org/10.1117/12.464471
Event: XVII International Conference on Coherent and Nonlinear Optics (ICONO 2001), 2001, Minsk, Belarus

Abstract

It is shown that for integrating control of thickness of uniform metal films along surface samples, an amplitude measuring is more promising in comparison with phase one.

Citation Download Citation

A. V. Reznikov "Thermal wave phase and amplitude measurements of thin metal films thickness", Proc. SPIE 4750, ICONO 2001: Quantum and Atomic Optics, High-Precision Measurements in Optics, and Optical Information Processing, Transmission, and Storage, (1 April 2002); https://doi.org/10.1117/12.464471

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