Compact laser plasma EUV source based on a gas puff target for metrology

Henryk Fiedorowicz; Andrzej Bartnik; Roman Jarocki; Jerzy Kostecki; Janusz Mikolajczyk; Rafal Rakowski; Miroslaw Szczurek

doi:10.1117/12.482749

16 June 2003 Compact laser plasma EUV source based on a gas puff target for metrology

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Janusz Mikolajczyk, Rafal Rakowski, Miroslaw Szczurek

Author Affiliations +

Proceedings Volume 5037, Emerging Lithographic Technologies VII; (2003) https://doi.org/10.1117/12.482749
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

In the paper a newly developed compact laser plasma EUV source is presented. The source is based on the double-stream gas puff target approach. The targets are formed by pulsed injection of high-Z gas (xenon) into a hollow stream of low-Z gas (helium) using the valve system composed of two electromagnetic valves and equipped with the double-nozzle setup. The outer stream of gas confines the inner stream improving the gas puff target characteristics (higher density of high-Z gas at longer distance from the nozzle output). It causes efficient absorption of laser energy in a plasma and strong EUV production. The source has been developed in the frame of the EUV sources development project under the MEDEA+ program.

Citation Download Citation

Henryk Fiedorowicz, Andrzej Bartnik, Roman Jarocki, Jerzy Kostecki, Janusz Mikolajczyk, Rafal Rakowski, and Miroslaw Szczurek "Compact laser plasma EUV source based on a gas puff target for metrology", Proc. SPIE 5037, Emerging Lithographic Technologies VII, (16 June 2003); https://doi.org/10.1117/12.482749

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