Novel spin-bowl-compatible wet developable bottom antireflective coating for i-line applications

Vandana N. Krishnamurthy; Charles J. Neef; Stephen R. Turner

doi:10.1117/12.483736

12 June 2003 Novel spin-bowl-compatible, wet developable bottom anti-reflective coating for i-line applications

Vandana N. Krishnamurthy, Charles J. Neef, Stephen R. Turner

Proceedings Volume 5039, Advances in Resist Technology and Processing XX; (2003) https://doi.org/10.1117/12.483736
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

A novel spin-bowl-compatible bottom anti-reflective coating (BARC) for i-line applications is presented in this study. The BARCs were prepared from a titanate sol-gel material, which exhibits excellent spin-bowl compatibility with a wide variety of solvents. A variable angle spectroscopic ellipsometer measurement on the titanate BARC gives an n (real refractive index) value of 1.71 and a k (imaginary refractive index) value of 0.40. The titanate BARC shows good compatibility with resist solvents and excellent photolithography performance with resolution down to 0.35 μm. No metal contamination was observed with this BARC when gate oxide integrity (GOI) testing was performed on different size capacitors.

Citation Download Citation

Vandana N. Krishnamurthy, Charles J. Neef, and Stephen R. Turner "Novel spin-bowl-compatible, wet developable bottom anti-reflective coating for i-line applications", Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); https://doi.org/10.1117/12.483736

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